发明名称 FINISHING MACHINE USING LASER BEAM
摘要 <p>A finishing machine using laser beam, comprising a work holding means (28) for holding a work, a laser beam machining means (64) for machining the work by radiating laser beam to the work held on the work holding means (28), a moving means for moving the work held on the work holding means relative to the laser beam radiated to the held work, and a sucking means (84) for sucking debris from a machining area where the laser beam is radiated to the work, the sucking means (84) further comprising a center hood (86), a center sucking source (92) for sucking debris through the center hood, an outer hood (88), and an outer sucking source (96) for sucking debris through the outer hood, wherein the suction force of the center sucking source is larger than that of the outer sucking source.</p>
申请公布号 WO03095140(A1) 申请公布日期 2003.11.20
申请号 WO2003JP05441 申请日期 2003.04.28
申请人 DISCO CORPORATION;SEKIYA, KAZUMA 发明人 SEKIYA, KAZUMA
分类号 B08B15/04;B23K26/00;B23K26/08;B23K26/14;B23K26/38;B23Q11/00;H01L21/301;(IPC1-7):B23K26/06 主分类号 B08B15/04
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