发明名称 APPARATUS FOR CONTROLLING GAS SCRUBBER
摘要 PURPOSE: An apparatus for controlling a gas scrubber is provided to be capable of stably flowing harmful gas into the gas scrubber and reducing the powder accumulated in the gas scrubber by constantly conserving the pressure of a harmful gas flowing path portion of the gas scrubber. CONSTITUTION: An apparatus for controlling a gas scrubber is provided with a pressure conserving part for constantly conserving the pressure of a harmful gas flowing path portion(10) and a humidity controlling part(12b) for decreasing the humidity of an exhaust path portion(17) to a predetermined setting level, or less. Preferably, the pressure conserving part includes a pressure sensor(11a) located at the harmful gas flowing path portion, a CPU(Central Processing Unit)(19) for carrying out a predetermined operation after receiving a signal from the pressure sensor, and a pressure controlling part(11b) operated by the output signal supplied from the CPU.
申请公布号 KR20030088518(A) 申请公布日期 2003.11.20
申请号 KR20020026022 申请日期 2002.05.11
申请人 CHA, WOO BYOUNG;CHOI, KYUNG SOO;KO, CHAN KYU 发明人 CHA, WOO BYOUNG;CHOI, KYUNG SOO;KO, CHAN KYU;KO, DONG YUN;PARK, DONG HWA
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
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