MICRO ELECTRO-MECHANICAL SYSTEM APPARATUS AND METHOD
摘要
A meso-scale MEMS device having a movable member (51) is formed using standard printed wiring board and high density interconnect technologies and practices. In one embodiment, sacrificial material disposed about the movable member (51) is removed through openings (101, 102) as formed through a cover (91) to form a cavity (121) that retains and limits the freedom of movement of the movable member (51). The movable member can support a reflective surface (224) to thereby provide a mechanism that will support a projection display and/or image scanner (such as a bar code scanner).
申请公布号
WO03095356(A2)
申请公布日期
2003.11.20
申请号
WO2003US13439
申请日期
2003.04.29
申请人
MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE