| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputtering cathode that can simplify replacing operation of a target and that can facilitate transportation, storage, replacement, etc., of a large-sized target. SOLUTION: For the cathode body 24 supporting a packing plate 23 with a target 22 fixed on the surface of the plate, there is installed a partition plate 34 hermetically shielding a space between the rear face of the packing plate 23 and a magnetic circuit 25, dispensing with a hermetically shielding member for the purpose of securing air-tightness between the packing plate 23 and the cathode body 24. As a result, the number of bolt members 30 is reduced for mounting the packing plate 23 for the cathode body, simplifying the replacing operation of the target 22. In addition, the target can also be divided, thereby facilitating transportation, storage, exchange, etc., even if it is large-sized. COPYRIGHT: (C)2004,JPO
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