| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for making connection faces of optical components meet each other, which can accurately detect a contact load during a face meeting operation without depending upon a load cell and obtain excellent durability and can be made to be small and light. SOLUTION: A tiltable pedestal 21 for supporting an optical component W1 is supported by a base 11 with a first hydrostatic spherical bearing 101 and a second hydrostatic spherical bearing 102, and a pressure sensor 41 for detecting working fluid pressures P1 and P2 between the faces of the hydrostatic spherical bearings is provided to control the contact load of two optical components W1 and W2 to be connected on the basis of the working fluid pressures P1 and P2 detected by the pressure sensor 41. COPYRIGHT: (C)2004,JPO
|
