| 摘要 |
PROBLEM TO BE SOLVED: To provide an opening/closing device of a vertical sputtering cathode whose maintenance operation is efficiently performed by easily securing a space for maintenance in accordance with increase in the size of a substrate. SOLUTION: The device is composed of a rotary mechanism which consists of a rotary hinge part 32 and a cathode turning cylinder 21 and which rotates the vertical sputtering cathodes 7a-7c around the vertical axis 22c along the side end edge 20 of each cathode, and an opening/closing mechanism which consists of a cathode opening/closing cylinder 31 and which opens/closes the vertical sputtering cathodes 7a-7c around the horizontal axes 8a-8c along the lower end edge of each cathode. Power cylinders are suitably used as the operating means for the rotary mechanism and the opening/closing mechanism of this device. COPYRIGHT: (C)2004,JPO
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