Tilt sensor and method of forming such device

摘要

Tilt sensor and method for forming the sensor with a piezoresistive membrane (10) having a weight (16) affixed proximate its center for detecting the tilt of a body. The membrane (10) may include four piezoresistors (12,14) placed proximate the edges (20, 22) of the membrane (10) at the points of maximum stress when the membrane (10) is subject to a uniform applied pressure. The piezoresistors (12,14) may form a Wheatstone bridge circuit to generate an output voltage in response to changes in resistance of the piezoresistors (12,14) under the uniform applied pressure. The output voltage may be indicative of the angle of inclination of a body. The membrane (10) may be fabricated from a silicon wafer using known photolithography and etching processes. The membrane (10) may be connected with a voltage source and secured within an appropriate housing to be placed in an operational environment. <IMAGE>