| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor biosensor capable of directly performing selective recognition or detection of protein or other biomolecules by using the electric response of a responsive nano-structure device. <P>SOLUTION: This semiconductor biosensor is equipped with a field effect transistor (FET) into which a silicon-on-insulator (SOI) is converted by means of a silicon conversion technology based on a lithography method. The structure of the transistor is made up such that conductivity is limited to a near-surface conductive thin film in a top Si layer separated from bulk Si by an embedded SiO<SB>2</SB>(BOX) layer and the FET is coated with a responsive surface. <P>COPYRIGHT: (C)2004,JPO |
