ELECTRICALLY INSPECTING PROBE AND INSPECTION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a probe, and an inspection device using it which enhance the degree of freedom of the arrangement of test terminals in an inspecting object, and also facilitate handling of inspection of a plurality of kinds of boards whose terminal positions for testing are different. SOLUTION: The probe to be used for electric inspection of a board of an inspecting object comprises a circuit board or semiconductor package, and is an electrically inspecting probe which has a flexible operation-controllable structure. COPYRIGHT: (C)2004,JPO