| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump system improved in service life by reducing the generation of damage in a protecting bearing. SOLUTION: The protecting bearing 20 is housed in a bearing housing 21 after operating a turbo-molecular pump, and a heater 23 pinched by the bearing housing 21 and a cover 22 heats the protecting bearing 20 for a constant time in the condition that the turbo-molecular pump is stopped to restrict corrosion of the protecting bearing 20. COPYRIGHT: (C)2004,JPO
|
