| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrodeposition system which continuously deposits oxide on a long-sized substrate and prevents the variation in characteristics of films by generation of stray current. SOLUTION: A feed roller 2006 which touches the long-sized substrate 2001 is kept at an independent potential and the rollers, exclusive of the feed roller 2006, which rollers touch the long-sized substrate 2001 are kept at a floating potential. COPYRIGHT: (C)2004,JPO
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