| 摘要 |
PROBLEM TO BE SOLVED: To obtain a measuring device for measuring a specified area to be measured on an article to be examined based on the image of the article to be examined formed by an image forming optical system, whose measurement error caused by the image forming performance of the image forming optical system is easily and surely restrained. SOLUTION: The measuring device uses the image forming optical system (L) whose object side is telecentric and is provided with an aperture diaphragm (12) whose position and/or posture can be changed. By optimizing the state of the aperture diaphragm in accordance with the position of the area to be measured (M) in the field of the image forming optical system, the image excellently expressing the area to be measured is formed, consequently, measuring accuracy is enhanced. COPYRIGHT: (C)2004,JPO
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