| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device, an inspection member, and their manufacturing method, which reduce high-frequency losses with respect to a high-frequency semiconductor device such as an SAW filter or the like when a high-frequency characteristic is measured, enable high-precision electric characteristic measurement, and are inexpensive. SOLUTION: The inspection device which inspects the electric characteristic of an object to be inspected 9 is provided with a stage mechanism 1, a probe card holder 2, and a probe card 3. The probe card 3 comprises a printed wiring board 4 having wiring patterns for signals and wiring patterns for the ground on an inspection surface to which leaf spring pins 5 are fitted in opposition to the object 9, and on the rear of the inspection surface on the opposite side of the inspection surface. A leaf spring pin 5s for a signal is connected to a through hole 46s or the wiring pattern 41s for a signal on the inspection surface, and the leaf spring pin 5g for the ground is connected to a through hole 46g or the wiring pattern 41g for the ground on the inspection surface. The wiring pattern 45s for signals on the rear of the inspection surface is connected to the signal wire portion 332 of a coaxial cable 33, and the wiring pattern 45g for the ground on the rear of the inspection surface is connected to the ground wire portion 331 of the coaxial cable 33. COPYRIGHT: (C)2004,JPO
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