| 摘要 |
PROBLEM TO BE SOLVED: To obtain a liquid ejection head having a movable member on an element substrate in which bonding properties are enhanced with respect to a top plate by making the height of the liquid chamber frame uniform. SOLUTION: When the movable member is formed, a base layer for making uniform the height of the liquid chamber frame is formed simultaneously on the lower layer thereof. When patterning is performed in order to form the movable member and the base thereof on the substrate, a structure is formed simultaneously on the channel wall and at the position of the substrate beneath the liquid chamber frame. The liquid chamber frame on the heating element substrate is formed simultaneously with formation of the channel wall on the heating element substrate. COPYRIGHT: (C)2004,JPO
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