| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying device capable of conveying a substrate without damaging it and being easily maintained. SOLUTION: A feed roller 23 comprises a ring member 24 directly contacting with a glass substrate 7 and a holding member 27 for fixing the ring member 24 to a roller shaft 22, and the ring member 24 is made of soft material. Providing a segmented part for the ring member 24 allows attachment or detachment of the ring member 24 to or from the roller shaft 22 without removing the roller shaft 22 from the conveying device 1. Thus, the glass substrate 7 can be conveyed without damage, and the maintenance work can be performed easily. COPYRIGHT: (C)2004,JPO |
