发明名称 METHOD FOR MANUFACTURING Ru-Al INTERMETALLIC COMPOUND TARGET, Ru-Al INTERMETALLIC COMPOUND TARGET, AND MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an intermetallic compound target having high transverse rupture strength and composed of an Ru-Al intermetallic compound of B2 superlattice, the target produced by the manufacturing method, and a magnetic recording medium. SOLUTION: In the method for manufacturing the Ru-Al intermetallic compound target, a reaction sintering method is used and metal Ru powder and metal Al powder are formed into an Ru-Al intermetallic compound composed essentially of B2 superlattice and then powder of the Ru-Al intermetallic compound prepared by pulverizing the intermetallic compound is sintered. The Ru-Al intermetallic compound target is constituted of a sintered compact which is produced by the manufacturing method and composed of the Ru-Al intermetallic compound powder composed essentially of B2 superlattice. In the magnetic recording medium, a film of the Ru-Al intermetallic compound composed essentially of B2 superlattice which is deposited using the above Ru-Al intermetallic compound target is used as at least one layer of a base film which is formed between a Co-based magnetic film and a nonmagnetic substrate. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003328118(A) 申请公布日期 2003.11.19
申请号 JP20030093647 申请日期 2003.03.31
申请人 HITACHI METALS LTD 发明人 UENO TOMONORI
分类号 B22F1/00;B22F3/10;C23C14/34;G11B5/64;G11B5/738;G11B5/84;(IPC1-7):C23C14/34 主分类号 B22F1/00
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