| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic detecting unit element of high magnetic field detection sensitivity and wide magnetic field detection range, with a stable sensitivity as a small element size, by forming a hard magnetic thin film in a region close to a magnetic thin film. SOLUTION: A soft magnetic thin film 2 is laminated on a glass substrate 1. A separation layer 5 composed of a hard magnetic thin film 4 and a non- magnetic thin film is alternately laminated for in-plane anisotrophy on the glass substrate 1 and the soft magnetic thin film 2, resulting in improved remnant magnetic flux density and coercive force. A Co-Ni-X film of high coercive force and good corrosion characteristic is suitable for composition of the hard magnetic thin film 4, with Pt and/or Cr being suitable for the component X. Related to the separation layer 5, a non-magnetic film is used to shut off the magnetism of the hard magnetic thin film 4, with Cr, CrO<SB>2</SB>, or other non- magnetic layer being preferred. COPYRIGHT: (C)2004,JPO
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