| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting the surface of an inspection object and an inspection apparatus capable of discriminating the surface indentation which exists in the inspection object and is derived from cutting work or grinding work from the indentation coming from other wounds and the defects of substrate. SOLUTION: This method of inspecting the surface of an inspection object comprises a first step of making two-dimensional image data corresponding to the surface of a rotating inspection object by measuring the surface of the inspection object optically by an one-dimensional line sensor or a two-dimensional sensor, a second step of providing low-frequency element image data and high-frequency element image data by wavelet transforming the two-dimensional image data, and a third step of detecting the change in data appearing in the low-frequency image data and the high-frequency image data. COPYRIGHT: (C)2004,JPO
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