| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser diffracting/scattering apparatus for measuring a grain distribution, which can reproducibly and accurately measure the grain distribution of a group of particles being sent into a sealed transparent member in such a condition that the grain size distribution is not uniform or attaching to the transparent member. SOLUTION: The apparatus is provided with optical system elements 1, 5 and 6 that project laser light onto a sample to be measured W being composed of the transparent member where the group of particles P are included therein or attach thereto, and measure a spatial intensity distribution of diffracted and scattered light, and a moving mechanism that moves at least one side of the sample to be measured W on a plane orthogonal to the optical axis of the laser light L so as to vary the position in the sample to be measured W on which the laser light L is projected, and thereby enabling to project the laser light onto a wide area of the sample to be measured W and to measure the diffracted and scattered light. The grain size distribution is calculated from the spatial intensity distribution of the diffracted and scattered light measured at each projecting position, and thereby reproducibly and accurately measuring the whole of the grain distribution of the group of particles P being included in or attaching to the sample to be measured W. COPYRIGHT: (C)2004,JPO
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