| 摘要 |
PROBLEM TO BE SOLVED: To provide a vortex sensor using a metallic vibrating pipe for improving the S/N ratio. SOLUTION: The metallic vibrating pipe 13 has an installing flange part 11 to a vortex generator, and a pressure receiving part 13a, and has a pressure detecting element plate, a conductive base material 14 having a plate facing to the pressure receiving side in axial symmetry to the vibrating pipe 13, and a piezoelectric element 15 respectively arranged on both side surfaces of the plate of the base material 14. This pressure detecting element plate is housed by contacting a lower end contact part 14a of the base material 14 with a wall surface separating a little from a bottom part of a recessed part by fixing an upper end joining part 14b of the base material 14 to an upper end part of the recessed part formed on the vibrating pipe 13. An upper part of the recessed part is sealed by a mold material. The sensor has a structure for connecting the outside of the upper end joining part 14b of the base material 14 and an inner wall of the metallic vibrating pipe 13 only by metal contact without molding the periphery of the piezoelectric element 15 inside of the vortex sensor 10 by resin. The pressure detecting element plate is formed so that the piezoelectric element 15 is drawn up to an upper fixing part of the vibrating pipe 13. COPYRIGHT: (C)2004,JPO
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