| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting defect capable of judging the defect detected in duplication when a defect detecting processing is performed by a plurality of defect detecting means for an object to be inspected. SOLUTION: This apparatus for inspecting defect is provided with a first and a second line image sensor 11, 12 which generate image data by photographing the object to be inspected in a plurality of imaging conditions differing from each other, a first - a fourth image processor 21-24 which perform the defect detecting processing in detecting conditions differing from each other based on the image data, and a host computer 3 which judges whether a plurality of detected defects are the defect at the same position as the object to be inspected each other or not. COPYRIGHT: (C)2004,JPO
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