| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measuring instrument having a simple structure for easy information processing for enabling the three-dimensional positional measurement for one or a plurality of measurement points without moving any sensor head, and performing measurement even when no characteristic point ready for an objective point is available. SOLUTION: The angle of a reflection surface at which a slit laser beam 7 reflected by a scanning mirror 2 with a surface thereof oscillating around an axis 6 of oscillation passing through a part in the vicinity of an optical center of a lens system 5 of a first camera is irradiated on an objective position is calculated based on an image of the first camera to pick up an image of a work to be measured in a condition that the slit laser beam 7 is not irradiated, and a three-dimensional shape of the work is calculated based on a signal of the image picked up by the first camera 1 and a second camera 4 at this calculation timing. COPYRIGHT: (C)2004,JPO
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