| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for inspecting an object layer to be inspected that easily judges the pass/fail of the object formed by the oxidization of a positive electrode, and a device for inspecting the same that easily judges the pass/fail of the object. <P>SOLUTION: An inspection device body 30 is provided of a light irradiating part 31 irradiating light to the surface of a sample C, a light receiving part 32 receiving the light reflected with the surface thereof, a control part 35 controlling the output timing of the light irradiating part 31 with controlling the activation of a stage ST, an evaluation part 33 for the strength of optical reflection determining the distribution of the reflection factors of the sample C from the output of the light receiving part 32, and a pass/fail judging part 34 judging the pass/fail from the output of the evaluation part 33. <P>COPYRIGHT: (C)2004,JPO</p> |
