| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a resin optical waveguide which is suitable for mass production, has a high productivity and a low loss, and is inexpensive. SOLUTION: The method of manufacturing of the resin optical waveguide is characterized by the fact that a suction type hot plate is used with which a resin substrate is heated while being sucked onto the hot plate as a heating means used in the manufacturing process of the resin optical waveguide in which process the optical waveguide is formed on the resin substrate such as fluorinated polyimide resin or the like. The defect of unevenness of temperature due to heating and the decrease in the homogeneity of film thickness are prevented, the deformation of the substrate after heated is prevented by avoiding the warpage and the deformation of the resin substrate during heated by using the suction type hot plate. Thus the resin optical waveguide having low loss and excellent optical characteristics is obtained. COPYRIGHT: (C)2004,JPO |
