| 摘要 |
PROBLEM TO BE SOLVED: To make easily settable the inter-electrode distance to a desired distance and easily formable a projection and an electrode pattern for sticking prevention or the like on a fixed electrode side. SOLUTION: An optical switch has a structure in which an upper substrate 60 is joined to a lower substrate 40 via a spacer 50. The upper substrate 60 has a three-layered structure of: an top-side single-crystal silicon layer 61 in which a V groove 64 is formed by anisotropic etching and micromirrors 65 are constituted by forming mirror bases and coating the mirror bases with metal; a rear-side single-crystal silicon layer 63 in which a movable electrode 67 and a flexure part 68 are formed; and a silicon dioxide layer 62 interposed between them. In the lower substrate 40, a fixed electrode 41 is formed. The inter-electrode distance is set according to the thickness of the spacer 50, the lower substrate 40 need not have a ridged part unlike before, and a fixed electrode formation surface is made flat. COPYRIGHT: (C)2004,JPO |
