| 摘要 |
PROBLEM TO BE SOLVED: To provide an inertial sensor with a sealed structure which can reduce the possibility of leakage of the air and which can be easily reduced in size. SOLUTION: The inertial sensor comprises a movable structure 10 movable in response to an inertial force, and an outer wall 5A for forming an internal space 30 for disposing a fixed electrode 9 for measuring the displacement of the structure 10. A silicon cap wafer 7 is disposed above the space 30, and connected to the upper part of the wall 5A to seal the space 30. An I/O electrode 27 for outputting a signal due to the electrode 9 or inputting a signal for controlling the electrode 9 from an external unit is formed on the wafer 7. COPYRIGHT: (C)2004,JPO
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