| 摘要 |
PROBLEM TO BE SOLVED: To enable the tilt, the acceleration or the like of an electrostatic capacity type sensor to be detected by the change in the electrostatic capacity, by incorporating the degrees of freedom or the like of mounting without correcting the displacement of a movable unit in the vertical direction due to a weight. SOLUTION: The electrostatic capacity type sensor comprise a fixed substrate 1 formed with a fixed electrode 1a, the movable unit 3d having a movable electrode disposed oppositely to the electrode 1a via a gap g and rockably to the substrate 1, a weight provided at the unit 3d, and a support 1b disposed between the substrate 1 and the weight 4 and rockably supporting the unit 3d. In this sensor, a plurality of at least one of the movable electrode and the electrode 1a are provided. COPYRIGHT: (C)2004,JPO
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