| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor, enabling accurate detection of gas concentration even under the condition of a high temperature. SOLUTION: This gas sensor 10 includes a measuring chamber 28 in which gas GS flows, and a detecting element body 40 facing the measuring chamber 28. The detecting element body 40 includes an element case 42 having a protective film 48 bonded to the base. A substantially columnar acoustic matching plate 50 and a piezoelectric element 51, and a cylinder 52 provided to surround the acoustic matching plate 50 and the piezoelectric element 51 are stored in the element case 42. After these are stored, the interior of the element case 42 is filled with a filler, whereby the acoustic matching plate 50, the piezoelectric element 51 and the cylinder 52 are sealed with a filler layer 99. COPYRIGHT: (C)2004,JPO
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