| 摘要 |
PROBLEM TO BE SOLVED: To estimate the refractive index of the surface of a sample in the case that the refractive index of the sample is not known in consideration of the heterogeneity of physical properties and to quantitatively estimate specular glossiness from both the surface structure of the sample and the estimated refractive index. SOLUTION: The three-dimensional structure of the surface of the sample is measured to acquire height distribution data (step S1). A surface shape parameter is extracted on the basis of the height distribution data (step S2). A one- dimensional variable-angle reflectivity distribution is measured (step S4). A one-dimensional variable-angle reflectivity observed data is acquired, and the effective reflectivity of the surface of the sample is acquired on the basis of the surface shape parameter and the one-dimensional variable-angle reflectivity data (step S5). The specular glossiness is computed on the basis of the surface shape parameter and the effective reflectivity (step S6). COPYRIGHT: (C)2004,JPO
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