| 摘要 |
PROBLEM TO BE SOLVED: To reduce vibration of a cooling stage. SOLUTION: Hot ends of a cold storage unit cylinder 34 and pulse tube cylinders 35 and 36 are inserted into and fixed to holes formed in a cylinder flange 8. After a mesh-like cold storage material 10 is filled in the cylinder 34, plugs 38 and 41 provided with holes communicating with a passage 14 are fitted, mounted and fixed to openings of the cylinder 34 and the cylinders 35 and 36 by freeze fitting or screwing. By increasing the rigidity of the cylinder flange 8 like this, deformation of the cylinder flange 8 caused by pulsation of pressure in the cylinders 35 and 36 is restrained and the vibration of the cooling stage 25 is prevented. After the cylinder 34 is fixed to the cylinder flange 8, the storage material 10 is filled in the cylinder 34 to prevent thermal influence on the storage material 10 in freeze fitting. COPYRIGHT: (C)2004,JPO
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