发明名称 GAS INTRODUCING STRUCTURE AND WORK ROOM
摘要 PROBLEM TO BE SOLVED: To provide a gas introducing structure for preventing lowering of intake quantity and lowering of differential pressure with the outside air by restraining the occurrence of a turbulent flow in taking gas. SOLUTION: In this gas introducing structure for ventilating a work room partitioned by a casing 36, a gas introducing structure is formed by a fan fitting hole 52 formed in a ceiling plate 36A of the casing, a rotating fan mechanism 54 provided on the inside of the casing facing to the fan fitting hole, a filter means 64 provided to be spread in the horizontal direction below the rotating fan mechanism, and a cylindrical streamline cylinder 70 provided to surround the fan fitting hole and raised upward from the opening end part partitioning the fan fitting hole. Thus, when the gas flows in, the flow of gas is streamlined by the action of the streamline cylinder to restrain the occurrence of an eddy near an eddy intake port. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003329279(A) 申请公布日期 2003.11.19
申请号 JP20020137644 申请日期 2002.05.13
申请人 TOKYO ELECTRON LTD 发明人 SHINDO TAKEHIRO;SASAKI YOSHIAKI
分类号 F24F7/06;F24F7/10;(IPC1-7):F24F7/10 主分类号 F24F7/06
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