发明名称 METHOD AND DEVICE FOR CONTROLLING GALVANOSCANNER
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent deterioration in positioning precision and a coil burning due to motor coil heat generation of a galvanoscanner while minimizing a decrease in throughput. <P>SOLUTION: Based on the state of variation of a driving signal, a state wherein an error due to the heat generation of a motor coil is about to occur is detected and the driving state is changed to suppress the heat generation of the motor coil. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003329960(A) 申请公布日期 2003.11.19
申请号 JP20020134278 申请日期 2002.05.09
申请人 SUMITOMO HEAVY IND LTD 发明人 ONISHI SHIROTERU;MORITA HIROSHI;OKUDAIRA YASUYUKI
分类号 G02B26/10;B23K26/00;B23K26/08;(IPC1-7):G02B26/10 主分类号 G02B26/10
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