| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone concentration meter capable of achieving compactness even in the case that a low concentration of ozone is to be measured and measuring a wide range of ozone concentrations from a low concentration to a high concentration. SOLUTION: In an ozone water concentration meter 31, ultraviolet rays are irradiated at an angle of incidence of 18°from an ultraviolet irradiation window 7 toward a side 4-3 of an ultraviolet reflecting surface 5 in the inner surface of a measuring cell 32. Ultraviolet rays similarly and sequentially multiply reflected at a side 4-5 and a side 4-2 and transmitted through an ultraviolet transmitting window 8 are received by an ultraviolet sensor 35 for measuring a low concentration of ozone. The attenuation ratio of the transmitted ultraviolet rays transmitted through ozone water is of a previously set upper limit value or less at the ultraviolet sensor 35 for measuring a low concentration of ozone, the concentration of ozone water is computed by Lambert-Beer's law and displayed on a concentration display 23. In the case that it is of the upper limit value or more, the concentration of ozone exceeds the measurement range of a low concentration of ozone, and the concentration of ozone water is computed on the basis of the results of light reception at an ultraviolet sensor 34 for measuring a high concentration of ozone and displayed on the concentration display 23. COPYRIGHT: (C)2004,JPO
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