POGO PIN CLEANING CARD OF PERFORMANCE BOARD FOR SEMICONDUCTOR INSPECTING APPARATUS AND CLEANING METHOD

摘要

PURPOSE: A pogo pin cleaning card of a performance board for a semiconductor inspecting apparatus and a cleaning method are provided to be capable of preventing the damage of a pogo pin when carrying out a cleaning process and simultaneously cleaning a plurality of pogo pins installed at the performance board. CONSTITUTION: A pogo pin cleaning card(20) of a performance board(40) for a semiconductor inspecting apparatus is provided with a cleaning board(22) having the same shape as a base substrate(42) of the performance board and a cleaning sheet(24) installed at one surface of the cleaning board. At this time, a plurality of pogo pins(44) are installed at one side of the base substrate of the performance board. Preferably, the cleaning sheet is a gel pack.