发明名称 |
Tuning-fork type vibration gyro and electrode trimming method therefor |
摘要 |
A tuning-fork type vibration gyro enables to suppress pyroelectric noise caused by temperature change and to obtain sensor output having high signal-to-noise ratio. The tuning-fork type vibration gyro includes a tuning-fork type vibration body having two arms mutually disposed in parallel and a base for commonly supporting one end of the each arm, wherein a longitudinal direction of the two arms is defined as a z-axis and a perpendicular direction thereto is defined as an x-axis; driving electrodes respectively formed on the two arms for generating vibration of the two arms in a direction parallel to the x-axis; detecting electrodes respectively formed on the two arms for detecting electromotive force generated when the tuning-fork type vibration body is rotated around the z-axis; and dummy electrodes formed on the two arms in respective areas different from the driving electrodes and the detecting electrodes.
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申请公布号 |
US6647786(B2) |
申请公布日期 |
2003.11.18 |
申请号 |
US20010930147 |
申请日期 |
2001.08.16 |
申请人 |
FUJITSU MEDIA DEVICES LIMITED |
发明人 |
OHTA KAZUHIRO;YACHI MASANORI;TAKAHASHI YOSHITAKA;KIKUCHI KAZUTSUGU;SAITO KEIJI |
分类号 |
G01P9/04;G01C19/56;G01P1/04;G01P21/00;H01L41/09;(IPC1-7):G01C19/00;G01P3/00 |
主分类号 |
G01P9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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