发明名称 Tuning-fork type vibration gyro and electrode trimming method therefor
摘要 A tuning-fork type vibration gyro enables to suppress pyroelectric noise caused by temperature change and to obtain sensor output having high signal-to-noise ratio. The tuning-fork type vibration gyro includes a tuning-fork type vibration body having two arms mutually disposed in parallel and a base for commonly supporting one end of the each arm, wherein a longitudinal direction of the two arms is defined as a z-axis and a perpendicular direction thereto is defined as an x-axis; driving electrodes respectively formed on the two arms for generating vibration of the two arms in a direction parallel to the x-axis; detecting electrodes respectively formed on the two arms for detecting electromotive force generated when the tuning-fork type vibration body is rotated around the z-axis; and dummy electrodes formed on the two arms in respective areas different from the driving electrodes and the detecting electrodes.
申请公布号 US6647786(B2) 申请公布日期 2003.11.18
申请号 US20010930147 申请日期 2001.08.16
申请人 FUJITSU MEDIA DEVICES LIMITED 发明人 OHTA KAZUHIRO;YACHI MASANORI;TAKAHASHI YOSHITAKA;KIKUCHI KAZUTSUGU;SAITO KEIJI
分类号 G01P9/04;G01C19/56;G01P1/04;G01P21/00;H01L41/09;(IPC1-7):G01C19/00;G01P3/00 主分类号 G01P9/04
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