发明名称 |
Method of forming regular array of microscopic structures on a substrate |
摘要 |
A method of forming a substantially regular array of microscopic structures on a surface of a sample (4) is described. The sample comprises a microscopic layer of at least one first material on a substrate of a second material, wherein the microscopic layer is sufficiently thin that stress fields at the interface of the microscopic layer and the substrate cause formation of separated regions of the first material on the substrate. The microscopic layer on the sample (4) is irradiated by means of a particle beam (5) at an acute angle alpha, to influence the direction of alignment of said separated regions and/or the relative position of adjacent said separated regions.
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申请公布号 |
US6649491(B2) |
申请公布日期 |
2003.11.18 |
申请号 |
US20020168239 |
申请日期 |
2002.06.17 |
申请人 |
EVER 1391 LIMITED |
发明人 |
SNOWDON JAMES KENNETH;BATZILL MARCUS MATTHIAS;BARDOU FRANCOIS |
分类号 |
H01J37/317;(IPC1-7):H01L21/322 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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