| 摘要 |
A Group III nitride film is directly grown on a crystalline substrate along the C-axis of the substrate, and includes at least Al. The Group III nitride film has a hexagonal crystal system, and the lattice constant "c" of the c-axis of the Group III nitride film and the lattice constant "a" of the crystal face perpendicular to the main surface of the substrate satisfies the relation of "C>2.636a-3.232".
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