METHOD AND APPARATUS FOR PRODUCING ULTRAPURE WATER

摘要

PROBLEM TO BE SOLVED: To provide a method for producing ultrapure water with reduced running cost and equipment cost by partially oxidizing a lower alcohol represented by isopropyl alcohol to produce a lower boiling point organic material such as lower aldehyde or lower ketone and removing the lower boiling point organic compound by gas liquid contact. SOLUTION: A method of removing lower alcohol in water comprizes a process for partially oxidizing the lower alcohol in the water to produce the lower boiling point organic compound and a process for removing the lower boiling point organic compound obtained by the partial oxidation by the gas liquid contact. The irradiation quantity of ultraviolet rays is remarkably reduced and because the lower alcohol is treated by an ultraviolet oxidation apparatus having a capacity smaller than that of a conventional ultraviolet oxidation apparatus and the removal of the decomposed product is carried out by a deaeration apparatus, the maintenance cost is also reduced. COPYRIGHT: (C)2004,JPO