| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member for holding an object to be polished and its manufacturing method capable of improving releasability of the member for holding the object to be polished and a polishing pad without lowering a polishing yield. <P>SOLUTION: The member for holding the object to be polished has a through- hole for holding the object to be polished, and it is characterized by that at least one face of the member is embossed. The manufacturing method of the member for holding the object to be polished is characterized by that it has a process of obtaining an intermediate product obtained by impregnating resin in a base material, and a process of placing an embossed member on at least one face of the intermediate product and subjecting them to pressure forming. <P>COPYRIGHT: (C)2004,JPO |
