| 摘要 |
An xy stage assembly having an xy stage supported by support shafts and having preload shafts applying a load to the xy stage. The support shafts or the preload shafts can be drive shafts that drive the xy stage in the x direction. The support shafts and the preload shafts are supported by journal/bearing structures that are individually translatable in the z-direction to selectively provide a pitch, roll or z-axis displacement to the xy stage. The support shafts and the preload shafts can be individually translated in the y-direction to provide yaw to the xy stage. Either the support shafts or the preload shafts or both can have wheels that ride in grooves in the xy stage. Alternatively, either the support shafts or the preload shafts or both can have grooves in the circumference of the shafts and the xy stage has rails in which the grooves on the shafts ride. The xy stage may be divided into two section joined by a compressive layer. The xy stage may have a compliant contact layer to provide higher traction between the shaft and the xy stage. The xy stage may have separate drive shafts to drive a belt that provides additional traction between the drive shafts and the xy stage.
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