发明名称 |
Master disc manufacturing apparatus |
摘要 |
An apparatus of manufacturing a master by irradiating an electron beam on a substrate mounted on a turntable includes a rotation drive section for rotating the turntable; first and second correction-signal generating sections for respectively detecting first and second asynchronous components of rotational fluctuation of the turntable in a predetermined direction and in a direction perpendicular to the predetermined direction to generate first and second correction signals; and a deflection control section for controlling the electron beam deflection on the basis of the first and second correction signals.
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申请公布号 |
US6650611(B1) |
申请公布日期 |
2003.11.18 |
申请号 |
US20010950015 |
申请日期 |
2001.09.12 |
申请人 |
PIONEER CORPORATION |
发明人 |
KAMIMURA KENJI;KURIYAMA KAZUMI;KUMASAKA OSAMU;KANEDA HIROKI;SONE MASAMI;IWATA TAKEHARU;KOBAYASHI MASAKI |
分类号 |
G11B7/26;H01J37/304;(IPC1-7):G11B7/00 |
主分类号 |
G11B7/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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