| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that wastewater mixed with ground refuse and shaven refuse generated through machining such as dicing, CMP (chemical- mechanical polishing) or the like is treated heretofore by two methods, that is, a flocculation and sedimentation method and a combination method of filtering and centrifugal separation but, in the former, filtered water can not be reutilized because chemicals are mixed with the filtered water and, in the latter, a system becomes large and an initial cost and a running cost become high. SOLUTION: In the first tank 75, the solid matter 12 trapped on the first filter 10 having unevenness is used as a second filter 13 to perform filtering. When external force is applied to the surface of the second filter 13, the solid matter 12 becomes able to move and clogging is prevented. The continuation of filtering becomes possible and the concentration of CMP wastewater can be increased. COPYRIGHT: (C)2004,JPO
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