发明名称 |
Method of producing near-net shape free standing articles by chemical vapor deposition |
摘要 |
Near net shape free standing articles can be produced by chemical vapor deposition techniques when a suitable substrate is suspended in a chemical vapor deposition zone according to the disclosed technique. By suspending such substrates from linear suspension supports such as ropes, cables and wires, multiple near net shape articles can be produced with substantial manufacturing cost savings over previously employed techniques.
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申请公布号 |
US6648977(B2) |
申请公布日期 |
2003.11.18 |
申请号 |
US20010907374 |
申请日期 |
2001.07.17 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
GOELA JITENDRA SINGH;SALIHBEGOVIC ZLATKO;PICKERING MICHAEL A.;BOUDREAUX MITCH |
分类号 |
C23C16/01;C23C16/44;C23C16/458;(IPC1-7):H01L21/00;C23C16/00 |
主分类号 |
C23C16/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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