LATCH FOR DETACHABLY ATTACHING AND MOUNTING A SEMICONDUCTOR WAFER TO A SUPPORT RING

摘要

A plurality of latches are employed for detachably holding a semiconductor wafer to a ring support during processing. Each latch is rotatably mounted on a post which is secured to the ring so that it can move to engage and disengage the wafer, alternately clamping and releasing it from the ring. Each latch has two opposed rollers, one to engage and disengage the wafer and the other to engage the ring. The latches should be freely rotatable into and out of engagement with the wafer. The ring usually has two pairs of opposed dimples such that each roller is in registration with each of the opposed dimples of each pair when it rotates from the engaged to the disengaged position and visa versa. The dimple in registration with the roller when engaged the wafer is sufficiently deep so that the roller does not touch the ring when clamped to the wafer. In that position, the opposing dimple is dimensioned so that the opposite roller in registration therewith engages the bottom of the dimple, tilting the latch to engage and clamp the wafer to the ring.