发明名称 |
FILTERSCHICHT UND DEREN VERWENDUNG ZUR REINIGUNG EINER FOTORESISTZUSAMMENSETZUNG |
摘要 |
A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross-section of said matrix. A process for removing ionic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom. |
申请公布号 |
AT251946(T) |
申请公布日期 |
2003.11.15 |
申请号 |
AT19970936305T |
申请日期 |
1997.07.30 |
申请人 |
CUNO INCORPORATED |
发明人 |
HOU, KENNETH, C.;OSTREICHER, EUGENE, A.;SALE, RICHARD, D. |
分类号 |
B01D39/14;A61K38/00;B01D15/04;B01D15/08;B01D39/18;B01J20/26;B01J20/28;B01J39/20;B01J47/00;B01J47/12 |
主分类号 |
B01D39/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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