Reactor for the deposition of a metal or ceramic coating under a rarefied atmosphere which can be applied in a sealed manner over a predefined zone on the surface of a substrate

摘要

A reactor (1) for the deposition of a metal or ceramic coating on a substrate in a rarefied atmosphere is made up of a chamber (2) with its inner volume (10) connected by an outlet (3) to a air pumping unit. This volume is open in the sense that the wall incorporates an opening (4) of which the edge (5): (a) is able to be totally applied on a predefined zone (7) of the surface (8) of the substrate; (b) is equipped with a joint able to assure sealing between the external atmosphere (9) and the inner volume of the reactor whilst it is put in depression by the pumping unit. An Independent claim is also included for a machine for the deposition of a metal or ceramic coating from a source or target on a substrate under a rarefied atmosphere.