| 摘要 |
PROBLEM TO BE SOLVED: To provide a planarization device which can assure planarity between a probe card and a wafer in manufacturing the probe card, and to provide a method for obtaining the planarity of the probe card. SOLUTION: A planarization gauge 301 has three depth indicator access holes 407, and is mechanically exchangeable with the probe card 113 mutually while having compatibility with an automatic semiconductor tester. The planarization gauge 301 comprises a rear flat surface 303 functioning as the system reference flat surface 119 of the automatic semiconductor tester, a front flat surface 305 which is in parallel and opposed to the rear flat surface 303 and functions as the system reference flat surface 119 of the automatic semiconductor tester, and optical targets 417 arranged on the front flat surface 305. COPYRIGHT: (C)2004,JPO
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