| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a halftone phase shifting mask blank capable of high- precision CD control. <P>SOLUTION: In the halftone phase shifting mask blank 1 having a phase shifter film 5, the phase shifter film 5 has a phase adjusting layer 4 which chiefly controls the phase of exposure light and a transmittance adjusting layer 3 formed between a transparent substrate 2 and the phase adjusting layer 4 and having a function to chiefly control the transmittance of exposure light, and the thickness of the transmittance adjusting layer 3 is≤90Å. <P>COPYRIGHT: (C)2004,JPO</p> |
