| 摘要 |
PURPOSE: A probe card holder is provided to be capable of easily replacing probe cards for a short time and horizontally conserving the probe card by carrying out a compulsory fixing method using a plurality of grooves. CONSTITUTION: A probe card holder(200) is provided with a base plate(210) having a loading groove for loading a probe card(10) by carrying out a compulsory fixing method and a fixing part(220) installed at the peripheral portion of the loading groove for fixing the probe card to the probe card holder. Preferably, a fixing groove is formed at the peripheral portion of the loading groove for being inserted with the fixing part. Preferably, a detaching groove is further formed at the peripheral portion of the loading groove for detaching the probe card from the probe card holder.
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