COPOLYMER HAVING ALCOHOLIC HYDROXY GROUP, AROMATIC RING AND LEAVING GROUP BY PROTON

摘要

PROBLEM TO BE SOLVED: To provide a copolymer exhibiting a high-level characteristics such as change in solubility in an alkaline aqueous solution before and after treatment with a free proton, adhesiveness to a substrate, developability, chemical resistance and etching resistance, suitably applicable to various applications and having a leaving group by a proton.

SOLUTION: The copolymer has a hydroxy group bonded to the main chain through one carbon atom, an aromatic ring and the leaving group by the proton. The copolymer having the leaving group by the proton has 20×10-10-1,500×10-10m/s alkali dissolving rate before the leaving group is released by the proton.

COPYRIGHT: (C)2004,JPO